JPH0446275Y2 - - Google Patents

Info

Publication number
JPH0446275Y2
JPH0446275Y2 JP1986077467U JP7746786U JPH0446275Y2 JP H0446275 Y2 JPH0446275 Y2 JP H0446275Y2 JP 1986077467 U JP1986077467 U JP 1986077467U JP 7746786 U JP7746786 U JP 7746786U JP H0446275 Y2 JPH0446275 Y2 JP H0446275Y2
Authority
JP
Japan
Prior art keywords
substrate
conveyor
exposure
arm
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986077467U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62188773U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986077467U priority Critical patent/JPH0446275Y2/ja
Priority to US07/005,858 priority patent/US4842412A/en
Publication of JPS62188773U publication Critical patent/JPS62188773U/ja
Application granted granted Critical
Publication of JPH0446275Y2 publication Critical patent/JPH0446275Y2/ja
Expired legal-status Critical Current

Links

JP1986077467U 1986-01-22 1986-05-21 Expired JPH0446275Y2 (en])

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1986077467U JPH0446275Y2 (en]) 1986-05-21 1986-05-21
US07/005,858 US4842412A (en) 1986-01-22 1987-01-21 Exposure apparatus employed for fabricating printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986077467U JPH0446275Y2 (en]) 1986-05-21 1986-05-21

Publications (2)

Publication Number Publication Date
JPS62188773U JPS62188773U (en]) 1987-12-01
JPH0446275Y2 true JPH0446275Y2 (en]) 1992-10-30

Family

ID=30925500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986077467U Expired JPH0446275Y2 (en]) 1986-01-22 1986-05-21

Country Status (1)

Country Link
JP (1) JPH0446275Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4644382B2 (ja) * 2001-04-24 2011-03-02 日立ビアメカニクス株式会社 露光システム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS433918Y1 (en]) * 1965-04-09 1968-02-19
JPS55158452U (en]) * 1979-04-25 1980-11-14
JPS60594U (ja) * 1983-06-17 1985-01-05 三菱重工業株式会社 原子炉炉心
JPS618557A (ja) * 1984-06-22 1986-01-16 Matsushita Electric Ind Co Ltd 加熱装置

Also Published As

Publication number Publication date
JPS62188773U (en]) 1987-12-01

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